APPARATUS AND METHOD FOR FAST AUTOMATIC APPROACHING OF PROBE SURFACE INSPECTION SYSTEM(PSIS)

摘要

PURPOSE: An apparatus and a method for a fast and automatic approaching operation of PSIS(Probe Surface Inspection System) are provided to enable fast and automatic approaching operation of a probe by classifying the descending operation of a probe coupled to a tip and cantilever into four steps. CONSTITUTION: A light source unit(410) irradiates light on a reflection plane of a cantilever coupled to a tip, and a driving unit(450) allows the probe to move down toward a surface of a sample so that the tip approaches the surface of the sample. An illumination measurement unit(420) collects the light reflected from the surface of the sample to measure illumination. A control unit(440) controls a driving unit to move the probe down to a first target point at a first speed. If the probe reaches the first point, the control unit moves the probe down at a second speed.