FABRICATION METHOD OF GRAPHENE FILM BY USING JOULE HEATING

摘要

PURPOSE: A method for manufacturing a grapheme film using a thermal resistance heating method is provided to uniform the surface by enlarging the particle size of graphite metal film. CONSTITUTION: A substrate with a graphite metal film is arranged in a chamber(S1). A current flows through either of the graphite metal film or the substrate to heat the graphite metal film using an electrothermal effect(S2). Vapor carbon source is supplied into the chamber to solidify carbon components in the graphite metal film(S3). The graphite metal film is cooled by adjusting the amount of the current to extract grapheme on the surface of the graphite metal film(S4).