发明名称 Maintaining A Wafer/Wafer Translator Pair In An Attached State Free Of A Gasket Disposed Therebetween
摘要 A wafer translator and a wafer, removably attached to each other, provides the electrical connection to electrical contacts on integrated circuits on a wafer in such a manner that the electrical contacts are substantially undamaged in the process of making such electrical connections. Various embodiments of the present invention provide a gasketless sealing means for facilitating the formation by vacuum attachment of the wafer/wafer translator pair. In this way, no gasket is required to be disposed between the wafer and the wafer translator. Air, or gas, is evacuated from between the wafer and wafer translator through one or more evacuation pathways in the gasketless sealing means.
申请公布号 US2011050274(A1) 申请公布日期 2011.03.03
申请号 US20090547418 申请日期 2009.08.25
申请人 DURBIN AARON;JOHNSON MORGAN T;SANTOS JOSE A 发明人 DURBIN AARON;JOHNSON MORGAN T.;SANTOS JOSE A.
分类号 G01R31/02;G01R1/067;G01R31/26 主分类号 G01R31/02
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