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发明名称
METHOD OF HEATING A SUBSTRATE IN A VARIABLE TEMPERATURE PROCESS USING A FIXED TEMPERATURE CHUCK
摘要
申请公布号
KR101018259(B1)
申请公布日期
2011.03.03
申请号
KR20057004134
申请日期
2003.09.10
申请人
发明人
分类号
H01L21/02;H01L21/027;G03F7/42;H01L21/00;H01L21/324
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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