| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To dispense more efficiently solution in an array shape on a substrate. <P>SOLUTION: A plurality of dispensation heads form an m×n array (m, n≥1) to the number of m in the longitudinal direction and to the number of n in the lateral direction, and a mechanism capable of changing array pitches in the longitudinal direction and in the lateral direction of the plurality of dispensation heads is provided. In the mechanism, a plate having holes in an array corresponding to a dispensation position and a plate having holes in an array similar to the array are arranged on the upper and lower sides at an interval, and the plurality of dispensation heads are held slidably by penetrating holes having a similar and symmetrical relation on two plates, and relative tilt angles of the plurality of dispensation heads are changed by narrowing or expanding the interval between two plates, to thereby change the pitch of a spout. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
