| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form a large number of fine holes in a glass substrate. SOLUTION: A glass substrate 10 is put in a container 20. The container 20 is heated to soften the glass substrate 10 in the container 20. A porous plate 50 with hollow buried pipes 90 inserted into a large number of through-holes 51 formed in the plate is pressed against the softened glass substrate 10 and the buried pipes 90 are inserted into the glass substrate 10. The container 20 is then cooled to solidify the glass substrate 10 in a state that the buried pipes 90 are inserted, thereby forming holes 100 in the glass substrate 10. COPYRIGHT: (C)2011,JPO&INPIT
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