发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device including a semiconductor substrate, and a memory cell and a peripheral circuit provided on the semiconductor substrate, the memory cell having a first insulating film, a first electrode layer, a second insulating film, and a second electrode layer provided on the semiconductor substrate in order, and the peripheral circuit having the first insulating film, the first electrode layer, the second insulating film having an opening for the peripheral circuit, and the second electrode layer electrically connected to the first electrode layer through the opening for the peripheral circuit, wherein a thickness of the first electrode layer under the second insulating film of the peripheral circuit is thicker than a thickness of the first electrode layer of the memory cell.
申请公布号 US2011053363(A1) 申请公布日期 2011.03.03
申请号 US20100917689 申请日期 2010.11.02
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 IWASE MASAO;IGUCHI TADASHI
分类号 H01L21/3205 主分类号 H01L21/3205
代理机构 代理人
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