| 发明名称 |
WIRE STRUCTURE, METHOD FOR FABRICATING WIRE, THIN FILM TRANSISTOR SUBSTRATE, AND METHOD FOR FABRICATING THIN FILM TRANSISTOR SUBSTRATE |
| 摘要 |
Provided are a wire structure, a method for fabricating a wire, a thin film transistor (TFT) substrate, and a method for fabricating a TFT substrate. The wire structure includes a barrier layer formed on a substrate and including copper nitride and a copper conductive layer formed on the barrier layer and including copper or a copper alloy
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| 申请公布号 |
US2011047792(A1) |
申请公布日期 |
2011.03.03 |
| 申请号 |
US20100942910 |
申请日期 |
2010.11.09 |
| 申请人 |
LEE JE-HUN;JEONG CHANG-OH;CHO BEOM-SEOK;BAE YANG-HO |
发明人 |
LEE JE-HUN;JEONG CHANG-OH;CHO BEOM-SEOK;BAE YANG-HO |
| 分类号 |
H01B13/00 |
主分类号 |
H01B13/00 |
| 代理机构 |
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