发明名称 |
Inspection Apparatus, Lithographic Apparatus and Method of Measuring a Property of a Substrate |
摘要 |
Scatterometers making use of a Glan-laser polarizer are described. The use of Glan-laser polarizers as described generally results in an improved extinction ratio and use over a greater range of wavelengths when compared with dielectric polarizers.
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申请公布号 |
US2011051129(A1) |
申请公布日期 |
2011.03.03 |
申请号 |
US20090922578 |
申请日期 |
2009.03.16 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
HUGERS RONALD FRANCISCUS HERMAN |
分类号 |
G01N21/23 |
主分类号 |
G01N21/23 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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