摘要 |
There is provided a film-forming device capable of advantageously superimposing and securing a substrate, a weight member, and/or a magnetic body while maintaining the precisely aligned substrate and mask in a superimposed state. The film-forming device is provided with a film-forming mask 5 and film-forming means for forming a thin film on the substrate 6 on which the film-forming mask 5 has been superimposed. The film-forming device comprises an aligning mechanism for moving the film-forming mask 5 and the substrate 6 relative to one another so that the film-forming mask 5 and the substrate 6 are aligned; a first superimposing and securing mechanism for superimposing and securing the substrate 6 and the film-forming mask 5 aligned by the aligning mechanism; and a second superimposing and securing mechanism for superimposing and securing the substrate superimposed and secured to the film-forming mask 5 by the first superimposing and securing mechanism, and a magnetic body 14 for magnetically attracting to an obverse surface side of the substrate 6 the film-forming mask 5 or a weight member 8 in the form of a sheet for causing the substrate 6 to bend and causing the substrate 6 to be affixably superimposed on the film-forming mask 5 so that the film-forming mask 5 is affixably superimposed on the substrate 6, the weight member being disposed on a reverse surface of the substrate 6.
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