发明名称 FILM FORMING DEVICE
摘要 There is provided a film-forming device capable of advantageously superimposing and securing a substrate, a weight member, and/or a magnetic body while maintaining the precisely aligned substrate and mask in a superimposed state. The film-forming device is provided with a film-forming mask 5 and film-forming means for forming a thin film on the substrate 6 on which the film-forming mask 5 has been superimposed. The film-forming device comprises an aligning mechanism for moving the film-forming mask 5 and the substrate 6 relative to one another so that the film-forming mask 5 and the substrate 6 are aligned; a first superimposing and securing mechanism for superimposing and securing the substrate 6 and the film-forming mask 5 aligned by the aligning mechanism; and a second superimposing and securing mechanism for superimposing and securing the substrate superimposed and secured to the film-forming mask 5 by the first superimposing and securing mechanism, and a magnetic body 14 for magnetically attracting to an obverse surface side of the substrate 6 the film-forming mask 5 or a weight member 8 in the form of a sheet for causing the substrate 6 to bend and causing the substrate 6 to be affixably superimposed on the film-forming mask 5 so that the film-forming mask 5 is affixably superimposed on the substrate 6, the weight member being disposed on a reverse surface of the substrate 6.
申请公布号 US2011048323(A1) 申请公布日期 2011.03.03
申请号 US20080863136 申请日期 2008.12.24
申请人 TOKKI CORPORATION 发明人 KONDO YOSHINARI;SUZUKI KENTARO;MATSUMOTO EICHI;TAJIMA MIYUKI
分类号 B05C13/00 主分类号 B05C13/00
代理机构 代理人
主权项
地址