发明名称 SHALLOW TRENCH TYPE QUADRI-CELL OF PHASE-CHANGE RANDOM ACCESS MEMORY (PRAM)
摘要 A method of forming a phase-change random access memory (PRAM) cell and PRAM arrangement, and embodiments of phase-change random access memory (PRAM) cells and PRAM arrangements are disclosed. A phase-change random access memory (PRAM) cell includes a bottom electrode, a heater resistor coupled to the bottom electrode, a phase change material (PCM) coupled to the heater resistor, and a top electrode coupled to the phase change material. An active region between the heater resistor and the phase change material is defined by a thickness of the heater resistor.
申请公布号 WO2010118346(A3) 申请公布日期 2011.03.03
申请号 WO2010US30572 申请日期 2010.04.09
申请人 QUALCOMM INCORPORATED;LI, XIA 发明人 LI, XIA
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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