发明名称 VISUAL INSPECTION APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a visual inspection apparatus for light emitting diode chips, capable of efficiently and reliably removing defective chips than heretofore and significantly reducing a time required for occurrence of removal missing, inspection and removal as a result. <P>SOLUTION: The visual inspection apparatus is used to inspect the external appearance of a light emitting diode chip, and it includes at least a holding means to expand and hold a chip on an adhesive sheet, a defective chip detection means comprised of at least illumination and an image camera, and a defective chip removal means for removing a defective chip detected by the defective chip detection means. The holding means includes the defective chip detection means and a holding means moving means for moving a chip in parallel in either one direction of x and y directions in the xy plane between the defective chip removal means and itself. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011044609(A) 申请公布日期 2011.03.03
申请号 JP20090192482 申请日期 2009.08.21
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 IKEDA HITOSHI
分类号 H01L33/00 主分类号 H01L33/00
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