| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an SOG (spin-on-glass) endless pattern, which is applicable to an endless mold or the like, by electron beam or ion beam radiation, to provide a method for manufacturing a resin pattern molding by using an SOG endless mold; to provide an SOG endless mold, and to provide an optical element. SOLUTION: The method for manufacturing the SOG endless pattern includes a process in which an SOG resist liquid film is formed on an aluminum substrate which is endless in the circumferential direction; a process in which the aluminum substrate having the SOG resist liquid film is heated to burn the SOG resist; a process in which the aluminum substrate having the SOG resist is cooled after the burning; a process in which the aluminum substrate having the SOG resist is rotated in the rotational direction after the cooling; a process in which the SOG resist on the substrate is irradiated with an electron beam or an ion beam; and a process in which part of the SOG resist is removed by irradiation or development after the irradiation. COPYRIGHT: (C)2011,JPO&INPIT |
