发明名称 Film Wrapped NFET Nanowire
摘要 A semiconductor structure includes an n-channel field effect transistor (NFET) nanowire, the NFET nanowire comprising a film wrapping around a core of the NFET nanowire, the film wrapping configured to provide tensile stress in the NFET nanowire. A method of making a semiconductor structure includes growing a film wrapping around a core of an n-channel field effect transistor (NFET) nanowire of the semiconductor structure, the film wrapping being configured to provide tensile stress in the NFET nanowire.
申请公布号 US2011049473(A1) 申请公布日期 2011.03.03
申请号 US20090549741 申请日期 2009.08.28
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHIDAMBARRAO DURESETI;SEKARIC LIDIJA
分类号 H01L29/12;H01L21/31 主分类号 H01L29/12
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