发明名称 |
Method and System to Control Movement of a Body for Nano-Scale Manufacturing |
摘要 |
Systems to control movement of a template during an imprint lithography process are described. The systems include an orientation stage having an inner frame, and outer frame, and a plurality of actuators coupled between the inner frame and the outer frame to vary translational motion and impart angular motion about a plurality of axes.
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申请公布号 |
US2011048160(A1) |
申请公布日期 |
2011.03.03 |
申请号 |
US20100942652 |
申请日期 |
2010.11.09 |
申请人 |
MOLECULAR IMPRINTS. INC. |
发明人 |
CHOI BYUNG-JIN;SREENIVASAN SIDLGATA V. |
分类号 |
G03F9/00;G03F7/00;G05G11/00 |
主分类号 |
G03F9/00 |
代理机构 |
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地址 |
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