| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar actuator that facilitates adjusting the vibration characteristics (Q value) of a movable part. SOLUTION: Aluminum wires 6a and 6b for carrying current to a drive coil 5 disposed in the movable part 4 are formed on torsion bars 3a and 3b for swingably supporting the movable part 4 with respect to a fixed part 2. A characteristic adjustment part 11 for adjusting the vibration characteristics (Q value) of the movable part 4 is formed on the torsion bars 3a and 3b line-symmetrically with respect to the aluminum wires 6a and 6b using the same material as that of the aluminum wires 6a and 6b or the same material as that of wire protection films of the aluminum wires 6a and 6b, simultaneously in a forming process of the aluminum wires 6a and 6b or wire protection films. The vibration characteristics (Q value) of the movable part 4 is adjusted to request characteristics (request Q value) by selection of a forming pattern of the characteristic adjustment part 11. COPYRIGHT: (C)2011,JPO&INPIT |
