| 摘要 |
PROBLEM TO BE SOLVED: To provide a microphone which solves the problem of stress at a diaphragm by applying processing to a base substrate, instead of applying processing to the diaphragm itself. SOLUTION: The microphone includes the base substrate, an electrode member, a vibrating membrane, and an insulating member. The base substrate has a through-hole in the longitudinal direction. The through-hole is used as a propagation route of sound. The electrode member is arranged in the lateral direction at the upper part of the base substrate. The vibrating membrane is arranged in the lateral direction between the base substrate and the electrode member or above the electrode member and may vibrate with the sound pressure of sound captured through the electrode member etc. The insulating member insulates the base substrate, the electrode member, and the vibrating membrane mutually in a state where the vibrating membrane may vibrate with the sound pressure. The microphone is fixed and utilized with a plurality of fixing members formed using the base substrate. Each of the plurality of fixing members is arranged at a position where the vibrating membrane is surrounded by the plurality of fixing members on a plane in which the base substrate spreads in the lateral direction. A slit in the longitudinal direction is arranged between a member and the vibrating membrane to partition the member and the vibrating membrane mutually. The member contains the plurality of fixing members on the plane in which the base substrate spreads in the lateral direction. COPYRIGHT: (C)2011,JPO&INPIT
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