| 摘要 |
PROBLEM TO BE SOLVED: To form a functional layer of uniform shape throughout a substrate by controlling variations in film shape formed on the surface of the substrate, when the functional layer of an organic EL element is formed by filling and drying coating liquid on the substrate in the organic EL panel. SOLUTION: A support table 23 on which the substrate 1 filled with ink is mounted is installed in a drying chamber 21, and a diffusion adjustment plate 24 is installed so as to cover over the support table 23. Heaters 25a, 25b for adjusting the temperature of the substrate 1 are installed on the upper face of the support table 23. The drying device 20 has a lifting pin 26 and a lifting mechanism 27 for diffusion adjustment plate for lifting and declining the diffusion adjustment plate 24. When the ink filled on the substrate 1 is dried, the diffusion adjustment plate 24 is made to be located near the substrate 1 and drying is carried out suppressing diffusion of solvent. COPYRIGHT: (C)2011,JPO&INPIT
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