| 发明名称 |
POLISHING APPARATUS AND POLISHING METHOD |
| 摘要 |
A plate material, while being transferred by a transfer mechanism, is sandwiched by two polishing heads. The plate material is transferred by the transfer mechanism while the two polishing heads are vibrated by a vibration mechanism in a direction crossing a transfer direction T of the plate material.
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| 申请公布号 |
US2011053461(A1) |
申请公布日期 |
2011.03.03 |
| 申请号 |
US20080811934 |
申请日期 |
2008.12.15 |
| 申请人 |
MASUDA YUKINORI;YATSUI TOSHINOBU |
发明人 |
MASUDA YUKINORI;YATSUI TOSHINOBU |
| 分类号 |
B24B1/00;B24B7/00;B24B37/08 |
主分类号 |
B24B1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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