发明名称 POROUS AMORPHOUS SILICON-CARBON NANOTUBE COMPOSITE BASED ELECTRODES FOR BATTERY APPLICATIONS
摘要 Embodiments of the present invention generally relate to methods and apparatus for forming an energy storage device. More particularly, embodiments described herein relate to methods of forming electric batteries and electrochemical capacitors. In one embodiment a method of forming a high surface area electrode for use in an energy storage device is provided. The method comprises forming an amorphous silicon layer on a current collector having a conductive surface, immersing the amorphous silicon layer in an electrolytic solution to form a series of interconnected pores in the amorphous silicon layer, and forming carbon nanotubes within the series of interconnected pores of the amorphous silicon layer.
申请公布号 US2011051322(A1) 申请公布日期 2011.03.03
申请号 US20100868230 申请日期 2010.08.25
申请人 APPLIED MATERIALS, INC. 发明人 PUSHPARAJ VICTOR L.;NALAMASU OMKARAM;VERHAVERBEKE STEVEN
分类号 H01L29/92;B05C1/00;C25D17/00;H01L21/02 主分类号 H01L29/92
代理机构 代理人
主权项
地址