Transport roller for use in transport system for conveying carriers through vacuum coating system that coats e.g. silicon wafer of solar system, has ring arranged in area of recess, where ring is made of plastic of medium hardness

摘要

The roller (1) has a recess (3) formed over a conically running circumference of the roller at two sides of a flange (5). Geometrically similar parts (1.1, 1.2) are connected with each other in a force-fit and/or form-fit manner and have a borehole (2) for attaching the roller at a shaft, where the parts are made of hard plastic with reduced friction coefficient. A ring (4) is made of plastic of medium hardness and arranged in an area of the recess, and the flange forms a guide for rails (6) of a carrier (7).