Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same

摘要

A thin film deposition apparatus used to manufacture large-sized display apparatuses on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus including a loading unit (710) fixing a substrate (500) onto an electrostatic chuck (600); a deposition unit (730) including a chamber (731) maintained in a vacuum state and a thin film deposition assembly (100,200,300,400) disposed in the chamber (731), separated from the substrate (500) by a predetermined distance, to deposit a thin film on the substrate (500) fixed on the electrostatic chuck (600); an unloading unit (720) separating the substrate (500) on which a deposition process is completed, from the electrostatic chuck (600); a first circulation unit (610) sequentially moving the electrostatic chuck (600) on which the substrate (500) is fixed from the loading unit (710) to the deposition unit (730), and the unloading unit (720); and a second circulation unit (620) returning the electrostatic chuck (600) separated from the substrate (500) to the loading unit (710) from the unloading unit (720), wherein the first circulation unit (610) passes through the chamber (731) when passing through the deposition unit (730).