Apparatus, method and program for predicting sensitivity of a piezoelectric or electrostrictive sensor

摘要

In an inspecting method of a piezoelectric/electrostrictive actuator having a piezoelectric/electrostrictive element and two or more electrodes, the frequency response characteristics is picked up when a vibration is given to the piezoelectric/ electrostrictive actuator, and the amount of displacement of the piezoelectric/electrostrictive actuator is predicted by the frequency response characteristics. The piezoelectric/ electrostrictive actuator is precisely inspected without dissolution and destruction and without actual driving as a product.