发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor device and a method of manufacturing the same are provided to optimize conditions of forming a thin film by using a doped polysilicon as an electrode and a wiring to suppress stress supplied to a semiconductor substrate from a first insulating film. CONSTITUTION: A semiconductor substrate(1) comprises a first main surface(10) and a second main surface(20). A plurality of electrodes(30a,30b) are formed in longitudinal direction of the semiconductor substrate from the first main surface. A wiring part(40a) is formed in longitudinal direction of the semiconductor substrate from the first main surface without penetrating the semiconductor substrate. The first insulating layer(3) is formed between an electrode and the wring part. The first electrode of electrodes penetrates the semiconductor substrate to reach to the second main surface.
申请公布号 KR20110020173(A) 申请公布日期 2011.03.02
申请号 KR20100073756 申请日期 2010.07.30
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 OKUMURA MIKA;HORIKAWA MAKIO;MURAKAMI TAKESHI
分类号 H01L21/768;H01L21/3205 主分类号 H01L21/768
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