METHOD FOR ALIGNING A SUBSTRATE

摘要

PURPOSE: A method for aligning a substrate is provided to align a substrate using a location of a predicted virtual alignment mark, thereby reducing alignment defects and errors. CONSTITUTION: A substrate(100) is placed in a stage(200). A stage alignment mark for aligning a substrate is formed on the stage. A calibration unit(300) arranges the substrate at a target location on the stage. A vision system(400) photographs the stage alignment mark and the substrate by a camera unit(410). An alignment controller(500) controls an operation of the calibration unit using an image photographed by the vision system.