发明名称 |
ELECTRON DETECTION SYSTEMS AND METHODS |
摘要 |
<p>Systems and methods to detect electrons from one or more samples are disclosed. In some embodiments, the systems and methods involve one or more magnetic field sources, for deflecting secondary electrons emitted from the surface of the samples.</p> |
申请公布号 |
EP2288905(A2) |
申请公布日期 |
2011.03.02 |
申请号 |
EP20090759042 |
申请日期 |
2009.05.26 |
申请人 |
CARL ZEISS NTS, LLC. |
发明人 |
HILL, RAYMOND;NOTTE IV, JOHN, A. |
分类号 |
G01N23/225;H01J37/26 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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