发明名称 METHOD AND DEVICE FOR TRANSPORTING OBJECTS
摘要 <p>The present invention relates to methods and apparatuses for the transporting of substantially flat, freely movable objects, wherein at least the holding and guiding takes place by use of a streaming liquid. The apparatus according to the invention comprises at least one treatment surface with at least one inflow region with a multitude of pass-through openings, at least one discharge region for discharging the liquid after provision of the inflow, but no non-fluidic edges, limiters, or other mechanical guiding aids for guiding the flat object. A transport device which bases on the invention can preferably be used within and between treatment plants for flat objects or substrates. Further; a preferably wet chemical treatment can take place simultaneously to the transport, provided that the transport liquid has according characteristics or involves according substances or active agents, respectively.</p>
申请公布号 EP2289097(A1) 申请公布日期 2011.03.02
申请号 EP20090765641 申请日期 2009.06.19
申请人 RENA GMBH 发明人 POTOFEEW, VITALIJ;BAREIS, DIRK;KALTENBACH, KONRAD;DELAHAYE, FRANCK
分类号 H01L21/677 主分类号 H01L21/677
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