SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A semiconductor manufacturing apparatus is provided to form a desired pattern and remove an unnecessary pattern by minutely controlling the position and size of an optical spot on a substrate. CONSTITUTION: In a semiconductor manufacturing apparatus, an attenuator(206) compensate light from a light source(204) by uniform illuminance. A first optical system(210) transfers a modulated light to a diffraction device(212) which controls the interval and size of the light from the first optical system A second optical system(213) transfers the light from the diffraction device to a third optical system(214) which includes at least one objective lens.