| 摘要 |
<p>PURPOSE: A levitation type substrate coater apparatus is provided to generate a levitation force in a cutting region by a gas sprayed from a spraying unit, thereby smoothly transferring a substrate to be processed with a levitation force. CONSTITUTION: A levitation stage(110) is fixed to a frame to levitate a processed substrate(G). A slit nozzle(120) sprays chemical solution on the substrate. A grabbing member grabs the substrate. A priming module(180) is located in a lower part of the substrate to form a bead in a discharge hole of the slit nozzle. A spraying unit sprays a gas to generate a levitation force in a cutting region.</p> |
