| 摘要 |
<p>PURPOSE: A levitation type substrate coater apparatus is provided to install a priming module in a lower middle part of a transfer route of a substrate to be processed, thereby minimizing a moving distance of a slit nozzle approaching to the priming module for forming a bead. CONSTITUTION: A levitation stage(110) is fixed to a frame(10) to levitate a substrate to be processed. A slit nozzle(120) sprays chemical solution on a surface of the substrate. A gantry(130) transfers the slit nozzle to a priming module(180). A rail(140) for transferring a substrate is arranged on both sides of the levitation state along with the length direction. A grabbing member(150) grabs the substrate.</p> |
