发明名称
摘要 PROBLEM TO BE SOLVED: To provide a scriber mechanism which can be attached to a tip of a spindle housing rotatably supporting a rotary spindle constituting a spindle unit of a cutting apparatus after detaching the cutting blades attached to the rotary spindle from the rotary spindle. SOLUTION: This scriber mechanism is attached to a tip of a spindle housing constituting a spindle unit of a cutting apparatus after cutting blades attached to a rotary spindle constituting the spindle unit are detached. The scriber mechanism has a base 81 formed attachably to the tip of the spindle housing 52, an arm 82 whose middle part is rotatably attached to the base member 81, a scriber attached to one end of the arm 82, and a loading means which applies a prescribed load to the other end of the arm 82 to make the one end side of the arm member 82 turn toward a process object held by a chuck table.
申请公布号 JP4643865(B2) 申请公布日期 2011.03.02
申请号 JP20010227309 申请日期 2001.07.27
申请人 发明人
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
主权项
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