Control of instruments, in particular of electron microscopes

摘要

A memory stores possible values of operating parameters corresponding to user controllable parameter e.g. accelerating voltage of electrode (12). A tuner alters the operating parameter value selected from memory and the memory is updated accordingly such that the adjusted value of operating parameter is subsequently selected from the memory if the same value of user controllable parameter is chosen again. An independent claim is included for a scanning charged particle beam instrument.