晶圆处理用热扩散板,申请号TW098306287-传众专利搜索

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发明名称	晶圆处理用热扩散板
摘要
申请公布号		申请公布日期	2011.03.01
申请号	TW098306287	申请日期	2009.12.25
申请人	东京威力科创股份有限公司	发明人	田中澄;小松智仁;川崎裕雄
分类号	1599	主分类号	1599
代理机构		代理人	林志刚台北市中山区南京东路2段125号7楼
主权项
地址	日本

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