发明名称 Method for fabricating pixel structure
摘要 A method for fabricating a pixel structure is disclosed. A substrate is provided. A first conductive layer is formed on the substrate, and a first shadow mask exposing a portion of the first conductive layer is disposed over the first conductive layer. Laser is used to irradiate the first conductive layer for removing the part of the first conductive layer and forming a gate. A gate dielectric layer is formed on the substrate to cover the gate. A channel layer is formed on the gate dielectric layer over the gate. A source and a drain are formed on the channel layer and respectively above both sides of the gate. A patterned passivation layer is formed to cover the channel layer and expose the drain. An electrode material layer is formed to cover the patterned passivation layer and the exposed drain.
申请公布号 US7897442(B2) 申请公布日期 2011.03.01
申请号 US20080105278 申请日期 2008.04.18
申请人 AU OPTRONICS CORPORATION 发明人 LIAO TA-WEN;YANG CHIH-CHUN;HUANG MING-YUAN;LIN HAN-TU;SHIH CHIH-HUNG;LIAO CHIN-YUEH;TSAI CHIA-CHI
分类号 H01L21/00 主分类号 H01L21/00
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