发明名称 Method for alkali doping of thin film photovoltaic materials
摘要 A method of manufacturing a solar cell includes providing a substrate, depositing a first electrode comprising an alkali-containing transition metal layer over the substrate, depositing at least one p-type semiconductor absorber layer over the first electrode, wherein the p-type semiconductor absorber layer includes a copper indium selenide (CIS) based alloy material, depositing an n-type semiconductor layer over the p-type semiconductor absorber layer, and depositing a second electrode over the n-type semiconductor layer. The step of depositing the alkali-containing transition metal layer includes sputtering from a first target comprising the transition metal and a second target comprising the alkali metal, where a composition of the first target is different from a composition of the second target.
申请公布号 US7897020(B2) 申请公布日期 2011.03.01
申请号 US20090385570 申请日期 2009.04.13
申请人 MIASOLE 发明人 MACKIE NEIL M.;JULIANO DANIEL R.;ZUBECK ROBERT B.
分类号 C23C14/34 主分类号 C23C14/34
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