ION BEAM IRRADIATING APPARATUS, AND METHOD OF PRODUCING SEMICONDUCTOR DEVICE,申请号KR20087030421-传众专利搜索

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发明名称	ION BEAM IRRADIATING APPARATUS, AND METHOD OF PRODUCING SEMICONDUCTOR DEVICE
摘要
申请公布号	KR101017335(B1)	申请公布日期	2011.02.28
申请号	KR20087030421	申请日期	2007.06.12
申请人		发明人
分类号	H01J37/317	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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