METHOD FOR FABRICATING MICROSTRUCTURES

摘要

PURPOSE: A method for manufacturing a micro structure is provided to variously change the shape of a liquid layer applied on the pattern of a substrate by changing the rotary speed of the substrate. CONSTITUTION: A micro post(114) is protruded from the upper side of a substrate(110), and a micro hole(113) is recessed from the upper side of the substrate. The micro post or the micro hole is formed based on a nano-imprint process. A spin coating process is used for applying a liquid layer(120) on the substrate. The surface inclined angle or the curvature shape of the liquid layer applied on the micro post or the micro hole is adjusted. The liquid layer is hardened.