发明名称 A METHOD FOR PRODUCING A NANOWIRE TRANSISTOR
摘要 <p>PURPOSE: A method for manufacturing a nano-wire transistor is provided to reduce cost required for manufacturing processes by effectively arranging a plurality of nano-wires between a source electrode and a drain electrode using dielectrophoresis method. CONSTITUTION: A source electrode and a drain electrode are formed on a substrate(S102). A gate electrode is formed between the source electrode and the drain electrode(S104). A gate insulator is formed on the gate electrode(S106). A nano-wire solution including nano-wire is applied on the substrate(S108). An alternating current signal is applied between the source electrode and the drain electrode(S110). The solution of the nano-wire is evaporated(S112).</p>
申请公布号 KR20110019551(A) 申请公布日期 2011.02.28
申请号 KR20090077126 申请日期 2009.08.20
申请人 KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION 发明人 HONG, BYOUNG HAK;HWANG, SUNG WOO;KANG, MYUNG GIL;KIM, HEE TAE;AHN, JAE HYUN;HWANG, DONG HOON
分类号 H01L29/78;B82B3/00;H01L21/336 主分类号 H01L29/78
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