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发明名称
APPARATUS FOR CHEMICAL VAPOR DEPOSITION
摘要
申请公布号
KR101018194(B1)
申请公布日期
2011.02.28
申请号
KR20080024331
申请日期
2008.03.17
申请人
发明人
分类号
C23C16/455;C22C16/00
主分类号
C23C16/455
代理机构
代理人
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