| 摘要 |
FIELD: physics. ^ SUBSTANCE: method is based on conversion of an initial halftone image of the analysed surface into a binary image and calculation of the two-dimensional autocorrelation function and its average value of the amplitude of the variable component. For the given probability, the confidence interval in which the average amplitude value found falls is determined, and its minimum and maximum values are determined therefrom. The available relationship between the average arithmetic deviation of the profile of standard surfaces from the average amplitude of the variable component of the autocorrelation functions for these surfaces is used to determine the average value of arithmetic deviation of the profile of the analysed surface, as well as its minimum and maximum value for the given probability of their determination. ^ EFFECT: faster operation and independence of the obtained results from intensity, stability requirements, coherence of the source of incident light flux, its angle of incidence on the analysed surface and perpendicularity of the optical axis of the objective of the analysed surface in a wide variation range. ^ 24 dwg |
