PLASMA GENERATION APPARATUS

摘要

PURPOSE: A supplies the RF power in a plurality of spots to the power electrode the plasma generating device forms the power electrode partitioning of line shape. CONSTITUTION: The whole is in other words side by side expanded in the inside of the vacuum container(110). It is perpendicularly separated in the plane including power electrodes and the substrate holder supporting substrate is arranged. Power electrodes have line shape. Power electrodes are equally divided N.