发明名称 PROCEDE DE FABRICATION D'UNE STRUCTURE SEMI-CONDUCTRICE PLAN DE MASSE ENTERRE
摘要 <p>The invention relates to a method for making a semiconducting structure, including: a) forming, on the surface of a semiconductor substrate (2), called the final substrate, a semiconducting layer (4), doped with elements from columns III and V of the Periodic Table so as to form a ground plane, b) forming a dielectric layer (3), c) then assembling, by direct adhesion of the source substrate, on the final substrate (2), the layer (4) forming the ground plane between the final substrate and the source substrate, the dielectric layer being between the source substrate and the ground plane, d) then thinning the source substrate, leaving, on the surface of the semiconductor structure, a film (20) made from a semiconducting material.</p>
申请公布号 FR2935067(B1) 申请公布日期 2011.02.25
申请号 FR20080055587 申请日期 2008.08.14
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 LE TIEC YANNICK;ANDRIEU FRANCOIS
分类号 H01L21/762 主分类号 H01L21/762
代理机构 代理人
主权项
地址