METHOD AND APPARATUS FOR EFFICIENT TEMPERATURE CONTROL USING A CONTACT VOLUME,申请号KR20067007931-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR EFFICIENT TEMPERATURE CONTROL USING A CONTACT VOLUME
摘要
申请公布号	KR101016738(B1)	申请公布日期	2011.02.25
申请号	KR20067007931	申请日期	2004.09.20
申请人		发明人
分类号	H01L21/687;C23C16/458;H01L;H01L21/00;H01L21/3065;H01L21/683;H05K7/20	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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