| 摘要 |
PROBLEM TO BE SOLVED: To detect an angular velocity around 3 axes with high precision by a time sharing detection operation. SOLUTION: An oscillator is bonded to the central portion of a lower face of a flexible supporter extending to an XY plane and a sensor body 300 having a drive element group and a detection element group on the top face thereof is prepared. A driving signal DrZ for Z-axis exciting the oscillator at a first-half period and a drive signal DrX for X-axis exciting the oscillator at a second-half period are generated by an operating signal generator 100 and supplied to the drive element group through a matrix converter 200. Each displacement SΔx, SΔy, SΔz of the oscillator in each axial direction is detected by a signal from the detection element group and transmitted to an AM detector AMD and a synchronous detector SD synchronous with the driving signal at only a vibration stabilization period through a switch SW. An amplitude Fxa and a phase Fxp of X-axis vibration and an amplitude Fza and a phase Fzp of Z-axis vibration are fed back to the operating signal generator 100 for feedback control and signals outputted from the predetermined synchronous detector SD are outputted as angular velocitiesωx,ωy,ωz of 3 axes. COPYRIGHT: (C)2011,JPO&INPIT |
