| 发明名称 |
TIO2-CONTAINING SILICA GLASS, AND OPTICAL MEMBER FOR EUV LITHOGRAPHY |
| 摘要 |
<p>A TiO2-containing silica glass having a TiO2 content of 7.5 to 12 mass% and a fictive temperature of 1000°C or higher, wherein the temperature at which the linear thermal expansion coefficient of the silica glass becomes 0 ppb/°C falls within the range from 40 to 110°C.</p> |
| 申请公布号 |
WO2011021609(A1) |
申请公布日期 |
2011.02.24 |
| 申请号 |
WO2010JP63834 |
申请日期 |
2010.08.16 |
| 申请人 |
ASAHI GLASS COMPANY, LIMITED.;KOIKE AKIO;IWAHASHI YASUTOMI;KIKUGAWA SHINYA |
发明人 |
KOIKE AKIO;IWAHASHI YASUTOMI;KIKUGAWA SHINYA |
| 分类号 |
C03C3/06;H01L21/027 |
主分类号 |
C03C3/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
