| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce a drive voltage for driving a movable part while suppressing increase of parasitic capacitance between a signal line and a drive line. <P>SOLUTION: A drive electrode 16a is arranged on the signal line 13, and a drive electrode 16b is arranged on a grounding line 14. An auxiliary drive electrode 17a is arranged in parallel to the drive electrode 16a, and an auxiliary drive electrode 17b is arranged in parallel to the drive electrode 16b. A movable electrode 19 is arranged on the drive electrodes 16a, 16b and the auxiliary drive electrodes 17a, 17b. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
