| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical system and aligner, capable of minimizing astigmatism, and to provide a device manufacturing method. <P>SOLUTION: One end 53a of an irradiation mechanism 51 for irradiating irradiation beam SL to an objective lens 35 housed in a lens tube 34 of a projection optical system 15 is disposed in the lens tube 34, and the other end 53b is disposed outside the lens tube 34. The optical system has: a light guide member 53 in which a light guide path for the irradiation beam SL is formed; an irradiation part provided to the one end 53a of the light guide member 53, and for irradiating the irradiation beam SL to the objective lens 35; a first drive source 75 disposed outside the lens tube 34; and a first transmission mechanism 76 for transmitting a first drive force generated by the first drive source 75 to the one end 53a of the light guide member 53 and for moving the position of the irradiation part. <P>COPYRIGHT: (C)2011,JPO&INPIT |
