发明名称 |
THIN FILM DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY DEVICE MANUFACTURED BY USING THE METHOD |
摘要 |
A thin film deposition apparatus that includes a thin film deposition assembly incorporating: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in the first direction; and a barrier plate assembly including a plurality of barrier plates that are disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein each of the barrier plates is separate from the patterning slit sheet.
|
申请公布号 |
US2011042659(A1) |
申请公布日期 |
2011.02.24 |
申请号 |
US20100836760 |
申请日期 |
2010.07.15 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
KIM JONG-HEON;PARK HYUN-SOOK;RYU JAE-KWANG;KANG HEE-CHEOL;OH JI-SOOK |
分类号 |
H01L51/05;B05D5/12;C23C16/04;H01L51/40 |
主分类号 |
H01L51/05 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|