发明名称 WATER-REACTIVE AL COMPOSITE MATERIAL, WATER-REACTIVE AL FILM, PROCESS FOR THE PRODUCTION OF THE AL FILM, AND CONSTITUENT MEMBER FOR FILM-FORMING CHAMBER
摘要 Provided herein are a water-reactive Al composite material which comprises 4NAI or 5NAI, as an Al raw material, containing, on the basis of the amount of the Al raw material, added Bi in an amount ranging from 0.8 to 1.4% by mass and Si, including the Si as an impurity of the Al raw material, in a total amount ranging from 0.25 to 0.7% by mass; a thermally sprayed Al film produced using this Al composite material; a method for the production of this Al film; and a constituent member for a film-forming chamber, which is provided, on the surface, with the thermally sprayed Al film.
申请公布号 US2011041763(A1) 申请公布日期 2011.02.24
申请号 US20090990176 申请日期 2009.04.27
申请人 ULVAC INC. 发明人 KADOWAKI YUTAKA;SAITOU TOMOKO;LIM KENG WENG;MUSHIAKE KATSUHIKO
分类号 B05C21/00;C21D1/00;C22C21/02 主分类号 B05C21/00
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