发明名称 Gate Stacks and Semiconductor Constructions
摘要 The invention includes methods of forming PMOS transistors and NMOS transistors. The NMOS transistors can be formed to have a thin silicon-containing material between a pair of metal nitride materials, while the PMOS transistors are formed to have the metal nitride materials directly against one another. The invention also includes constructions which contain an NMOS transistor gate stack having a thin silicon-containing material between a pair of metal nitride materials. The silicon-containing material can, for example, consist of silicon, conductively-doped silicon, or silicon oxide; and can have a thickness of less than or equal to about 30 angstroms.
申请公布号 US2011042754(A1) 申请公布日期 2011.02.24
申请号 US20100938114 申请日期 2010.11.02
申请人 MICRON TECHNOLOGY, INC. 发明人 RAMASWAMY D.V. NIRMAL;ANANTHAN VENKATESAN
分类号 H01L29/78;H01L27/092 主分类号 H01L29/78
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